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TITLE: FREE CAD FOR MEMS
The increasing integration of MEMS (Micro-Electro-Mechanical
Systems) has pushed the demand for CAD tools to support rapid
design of systems involving physical interactions between
multiple domains such as electrical, mechanical, and thermal. At
present, MEMS simulation is most often performed using direct
numerical simulation or signal flow analysis that is arduous and
time consuming for system design due to its low level of
abstraction. In contrast, nodal simulation enables a structured
representation for MEMS design using a hierarchical set of MEM
components. A such example is NODASv1.4 created by Carnegie
Mellon's MEMS LAB.
NODASv1.4 is a library of parameterized components for using
SABER nodal simulator to simulate surface-micromachined MEMS
devices. The library is composed of beams, plate masses, anchors,
electrostatic comb drives (vertical and horizontal), and
electrostatic gaps (horizontal). The components can be
interconnected to represent both devices and more complex
systems. Electrical properties are included in the component
models, enabling electrical and electromechanical analysis to be
performed simultaneously.
For additional information, access: NODAS
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