MICROELECTRONIC SYSTEMS NEWS
FILENUMBER: 9165
BEGIN_KEYWORDS
MUMPS: Multi-User MEMS Processes MCNC
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DATE: september 1996
TITLE: MUMPS: Multi-User MEMS Processes at MCNC
MUMPS: Multi-User MEMS Processes at MCNC
The Multi-User MEMS Processes, or MUMPs, is a DARPA-supported program
designed to provide low-cost access to MEMS technology. Hundreds of
users from the domestic industry, government and academic communities
have used MUMPs to access MEMS. MUMPs provides low-risk opportunities
for small business and industry to access the prototype-to-commercialization
pathway. Past participants have created a wide range of devices using MUMPs,
including accelerometers, micro optical components, actuators, motors and many others.
MUMPs is a three-layer polysilicon surface micromachining process
designed to be as general as possible to provide maximum user flexibility.
Polysilicon is used as the structural material, deposited oxide (PSG)
as the sacrificial material, and silicon nitride for electrical isolation
from the substrate. The process is derived from work performed by the
Berkeley Sensors and Actuators Center at the University of California,
Berkeley. Examples of devices created from previous runs are available
in the SEM Picture Gallery.
Access: WWW.
From markus@mcnc.org Thu Sep 12 13:01:51 1996
Subject: Re: NSF and MUMPS
To: dbouldin@utk.edu
Hi Don
NSF does not directly support the cost of MUMPs projects. It is expected that
researchers cover their own cost, which is not very much ($850 for 15 1cmx1cm
die).
Thanks
Karen
****************************************************************************
* Karen W. Markus *
* Director, MEMS Technology Applications Center *
* MCNC *
* PO Box 12889 *
* 3021 Cornwallis Rd. *
* Research Triangle Park, NC 27709-2889 *
* *
* (919) 248-1437 phone (919) 248-1455 fax *
* http://mems.mcnc.org/ *
* markus@mcnc.org *
****************************************************************************
dbouldin@utk.edu
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