Facilities
 
Microfluidics and Transducer Characterization (SERF 536)
 
UTK MEMS Lithography Laboratory (SERF 516)
 
ORNL Microfabrication Lab
 
 
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SERF536 Equipment List
 
 
 
Fume Hood and Wet Bench
Spin coater
Medical freezer (-20C and 0C)
 
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Optical instruments:

· Hamamatsu Micro spectrometer

· Hamamatsu APD module

· PMT module

· Various optical tubes, filters, optical fibers and connectors

· UV light source

 
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Micro sample testing and inspection:

· Micromanipulator 6400 Probe Station

· Bausch & Lomb Microzoom II Microscope

· Nikon LV-100D BF/DF/DIC/FLUOR Microscope, with z motorized stage
FL filters (Blue 470/500 nm and Green 536/565 nm), 40x~100X FL and ELWD objectives (0x/.70, 1.1~2.1 mm WD), 
 
· Nikon SMZ1000 Zoom Stereo Microscope
· Boom Stand
· Vanguard 1293 CMI Inverted Microscope
· Dual Illumination Zoom Stereo Microscope
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Microscope Imaging system:

· Monochrome Digital Camera--Coolsnap ES: High Speed, High Sensitivity, 20MHz digitization, 8 e- noise, 1300x1030 (6.45 um²) pixels
· Color Digital Camera, 1280x1024 pixels
· Color Video Camera

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Electronic testing instruments:

· Agilent 4294A-Precision Impedance Analyzer, 40Hz-110MHz

· Circuit Sleuth - Frequency Response Analyzer, 0.1Hz to 40 MHz

· Keithley 2700 DMM/Data Acquisition System

· Signal Recovery 7265 Dual Phase DSP Lock-in Amplifier

Waveform generators:

· Tabor Pulse/Function Generator 8551, 10 mHz to 50 MHz, 10 mV to 32 Vp-p

· Agilent 33220 Function/Arbitrary Waveform Generator 1μHz to 20 MHz,

Qty: 2 —with phase lock-in option to produce traveling wave

· Agilent 33120A Function/Arbitrary Waveform Generator 1μHz to 15 MHz

Oscilloscopes:

· Agilent MSO6012A Mixed-signal Oscilloscope, 100 MHz, 2 GSa/s, 2+16 Ch.

· Agilent DSO3062A Digital Oscilloscope, 60 MHz, 1GSa/s, 2 Ch.

· HP 54600B Oscilloscope, 100 MHz, 2 Ch.

· Tektronix TDS2014 Oscilloscope, 100 MHz, 1GSa/s, 4 Ch.

· Extech 381295 5MHz Multiscope

Amplifiers and Power suppliers:

· TEGAM Dual Channel High Voltage Precision Power Amplifier, 400 Vp-p, DC-2 MHz

· CPS Model 0550 DC power supply, 0-5000 V, 0-50 mA

· BK Precision Triple Output DC power supply, 0-32 V, 0-3 A

· 9312-PS DC power supply, 0-120 V, 0-1 A, Qty: 2

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Simulation Software:

· COMSOL Multiphysics 3.5a including AC/DC, MEMS and RF modules

· Ansoft Maxwell SV for Electromagnetic Simulation

· PSpice

· MicroCap

· Matlab, etc.

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Miscellaneous:

Ultrasonic Cleaner, High Precision Scale, 2 Syringe Pumps, etc.

 
 
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