Gu Group Facilities
Modular, versatile remote plasma-enhanced CVD system
Simple thermal CVD system
Probestation in ambient-controlled glovebox
Other facilities
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Details to be added
Facilities Accessed through Collaboration
Atomic-resolution Z-contrast scanning transmission electron microscopes (STEMs) at ORNL
Facilities at Center for Nanophase Materials Sciences (CNMS), ORNL
E-beam lithography
ALD
General cleanroom use